JPH02133471U - - Google Patents

Info

Publication number
JPH02133471U
JPH02133471U JP3922189U JP3922189U JPH02133471U JP H02133471 U JPH02133471 U JP H02133471U JP 3922189 U JP3922189 U JP 3922189U JP 3922189 U JP3922189 U JP 3922189U JP H02133471 U JPH02133471 U JP H02133471U
Authority
JP
Japan
Prior art keywords
nozzle
liquid
sensor
container
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3922189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0622464Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3922189U priority Critical patent/JPH0622464Y2/ja
Publication of JPH02133471U publication Critical patent/JPH02133471U/ja
Application granted granted Critical
Publication of JPH0622464Y2 publication Critical patent/JPH0622464Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP3922189U 1989-04-04 1989-04-04 薬液吐出装置 Expired - Lifetime JPH0622464Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3922189U JPH0622464Y2 (ja) 1989-04-04 1989-04-04 薬液吐出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3922189U JPH0622464Y2 (ja) 1989-04-04 1989-04-04 薬液吐出装置

Publications (2)

Publication Number Publication Date
JPH02133471U true JPH02133471U (en]) 1990-11-06
JPH0622464Y2 JPH0622464Y2 (ja) 1994-06-15

Family

ID=31547936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3922189U Expired - Lifetime JPH0622464Y2 (ja) 1989-04-04 1989-04-04 薬液吐出装置

Country Status (1)

Country Link
JP (1) JPH0622464Y2 (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006313822A (ja) * 2005-05-09 2006-11-16 Tokyo Electron Ltd 処理液吐出装置およびその動作検証方法ならびに同装置の駆動制御方法
JP2008521087A (ja) * 2004-11-15 2008-06-19 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド 液体供給システム
JP2011157136A (ja) * 2004-04-13 2011-08-18 Advanced Technology Materials Inc 上部スペースの気体除去を伴う、液体分配のための方法およびシステム
JP2020163277A (ja) * 2019-03-29 2020-10-08 ヤマト科学株式会社 容器の配管接続構造
JP2020171212A (ja) * 2019-04-09 2020-10-22 ヤマト科学株式会社 固相合成装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011157136A (ja) * 2004-04-13 2011-08-18 Advanced Technology Materials Inc 上部スペースの気体除去を伴う、液体分配のための方法およびシステム
JP2008521087A (ja) * 2004-11-15 2008-06-19 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド 液体供給システム
JP2006313822A (ja) * 2005-05-09 2006-11-16 Tokyo Electron Ltd 処理液吐出装置およびその動作検証方法ならびに同装置の駆動制御方法
JP2020163277A (ja) * 2019-03-29 2020-10-08 ヤマト科学株式会社 容器の配管接続構造
JP2020171212A (ja) * 2019-04-09 2020-10-22 ヤマト科学株式会社 固相合成装置

Also Published As

Publication number Publication date
JPH0622464Y2 (ja) 1994-06-15

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